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An improved technology for fabrication of integrated Pb(Zr, Ti)O 3 ferroelectric capacitor
Whining, Huang, Yinyin, Lin, Tingao, TangVolume:
259
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190108008757
Date:
January, 2001
File:
PDF, 497 KB
english, 2001