Role of recovery anneals for chemical solution deposition...

Integrated Ferroelectrics 1998 / 03 Vol. 22; Iss. 1-4

Role of recovery anneals for chemical solution deposition (CSD) based SrBi 2 Ta 2 O 9 (SBT) thin films

Hartner, Walter, Schindler, Günther, Weinrich, Volker, Nagel, Nicolas, Engelhardt, Manfred, Joshi, Vikram, Solayappan, Narayan, Derbenwick, Gary, Dehm, Christine, Mazure, Carlos
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Volume:
22
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808208026
Date:
March, 1998
File:
PDF, 829 KB
english, 1998
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