Influence of a-SiN x : H composition on transfer-doping and electron-trapping effects in a-SiN x : H/a-Si: H superlattices
Yoshimura, Tetsuzo, Hiranaka, Kouichi, Yamaguchi, Tadahisa, Yanagisawa, ShintaroVolume:
55
Language:
english
Journal:
Philosophical Magazine Part B
DOI:
10.1080/13642818708208624
Date:
March, 1987
File:
PDF, 513 KB
english, 1987