Characterization of Wide Bandgap Thin Film Growth Using...

Journal of Wide Bandgap Materials 2002 / 01 Vol. 9; Iss. 3

Characterization of Wide Bandgap Thin Film Growth Using UV-Extended Real Time Spectroscopic Ellipsometry: Applications to Cubic Boron Nitride

Zapien, J. A., Collins, R. W., Pilione, L. J., Messier, R.
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Volume:
9
Language:
english
Journal:
Journal of Wide Bandgap Materials
DOI:
10.1106/152451102024505
Date:
January, 2002
File:
PDF, 217 KB
english, 2002
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