A Resultant Stress Effect of Contact Etching Stop Layer and...

A Resultant Stress Effect of Contact Etching Stop Layer and Geometrical Designs of Poly Gate on Nanoscaled nMOSFETs with a Si1−xGex Channel

Lee, Chang-Chun, Liu, Chuan-Hsi, Chen, Zih-Han, Tzeng, Tzai-Liang
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Volume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.10227
Date:
March, 2015
File:
PDF, 648 KB
english, 2015
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