Back-end-of-line compatible Poly-SiGe lateral...

Microsystem Technologies 2017 / 6 Vol. 23; Iss. 6

Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect

Harrison, Kimberly L., Clary, William A., Provine, J., Howe, Roger T.
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2932-1
Date:
June, 2017
File:
PDF, 767 KB
english, 2017
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