Silicon tip sharpening based on thermal oxidation technology
He, Huan, Zhang, Jinying, Yang, Jinling, Yang, FuhuaVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2941-0
Date:
June, 2017
File:
PDF, 1.05 MB
english, 2017