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Role of silylene in the deposition of hydrogenated amorphous silicon
Dietrich, Thomas R., Chiussi, Stefano, Marek, Michael, Roth, Angelika, Comes, Franz J.Volume:
95
Language:
english
Journal:
The Journal of Physical Chemistry
DOI:
10.1021/j100176a050
Date:
November, 1991
File:
PDF, 1.14 MB
english, 1991