Direct Writing of High Frequency Surface Acoustic Wave...

Ferroelectrics 2008 / 05 Vol. 362; Iss. 1

Direct Writing of High Frequency Surface Acoustic Wave Devices on Epitaxial Pb(Zr 0.20 Ti 0.80 )O 3 Thin Layers Using Focus Ion Beam Etching

Salut, R., Gariglio, S., Daniau, W., Majjad, H., Triscone, G., Triscone, J.-M., Ballandras, S.
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Volume:
362
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190802006731
Date:
May, 2008
File:
PDF, 1.57 MB
english, 2008
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