DESIGN AND PROCESSING OF INTEGRATED MICRO ACCEL-EROMETERS...

Journal of the Chinese Institute of Engineers 1997 / 01 Vol. 20; Iss. 1

DESIGN AND PROCESSING OF INTEGRATED MICRO ACCEL-EROMETERS USING STANDARD CMOS PROCESS

Dai, Ching-Liang, Lu, Shui-Shong, Chang, Pei-Zen
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Volume:
20
Language:
english
Journal:
Journal of the Chinese Institute of Engineers
DOI:
10.1080/02533839.1997.9741805
Date:
January, 1997
File:
PDF, 1.39 MB
english, 1997
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