Fabrication of pb(zr,ti)o 3...

Integrated Ferroelectrics 2001 / 01 Vol. 36; Iss. 1-4

Fabrication of pb(zr,ti)o 3 thin films by liquid delivery mocvd using zr(dibm) 4 /thf as a zirconium precursor

Miyake, Masato, Lee, Kyungho, Okamura, Soichiro, Shiosaki, Tadashi
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Volume:
36
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108015535
Date:
January, 2001
File:
PDF, 569 KB
english, 2001
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