Low resistive Au-free, Ta-based, recessed ohmic contacts to...

Semiconductor Science and Technology 2015 / 10 Vol. 30; Iss. 10

Low resistive Au-free, Ta-based, recessed ohmic contacts to InAlN/AlN/GaN heterostructures

Bergsten, J, Malmros, A, Tordjman, M, Gamarra, P, Lacam, C, di Forte-Poisson, M-A, Rorsman, N
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Volume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/10/105034
Date:
October, 2015
File:
PDF, 635 KB
english, 2015
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