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Thermal stability of nitrided high-k dielectrics
L. Miotti, K. P. Bastos, R. P. Pezzi, G. V. Soares, C. Driemeier, E. B. O da Rosa, I. J. R. Baumvol, J. MoraisVolume:
201
Year:
2004
Language:
english
Pages:
11
DOI:
10.1002/pssa.200304361
File:
PDF, 481 KB
english, 2004