High-rate-deposition of Ni–Zn ferrite thin-films using ECR...

physica status solidi (a) 2004 Vol. 201; Iss. 8

High-rate-deposition of Ni–Zn ferrite thin-films using ECR sputtering with conic target

Setsuo Yamamoto, Tomoharu Ogita, Hiroki Kurisu, Mitsuru Matsuura, Yoshihiro Shimosato, Shigenobu Okada
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Volume:
201
Year:
2004
Language:
english
Pages:
5
DOI:
10.1002/pssa.200304516
File:
PDF, 179 KB
english, 2004
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