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Interfacial strain in 3C-SiC/Si(100) pseudo-substrates for cubic nitride epitaxy
E. Bustarret, D. Vobornik, A. Roulot, T. Chassagne, G. Ferro, Y. Monteil, E. Martinez-Guerrero, H. Mariette, B. Daudin, Le Si DangVolume:
195
Year:
2003
Language:
english
Pages:
8
DOI:
10.1002/pssa.200306261
File:
PDF, 289 KB
english, 2003