Properties of TiOx coatings prepared by dc magnetron sputtering
S. H. Mohamed, O. Kappertz, T. P. Leervad Pedersen, R. Drese, M. WuttigVolume:
198
Year:
2003
Language:
english
Pages:
14
DOI:
10.1002/pssa.200306597
File:
PDF, 996 KB
english, 2003