Aluminum oxide thin films deposited on silicon substrates...

Aluminum oxide thin films deposited on silicon substrates from Al(NO3)3 and an organic solvent by spray pyrolysis

M. Aguilar-Frutis, J. Guzmán-Mendoza, T. Alejos, M. García-Hipólito, C. Falcony
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Volume:
199
Year:
2003
Language:
english
Pages:
6
DOI:
10.1002/pssa.200306642
File:
PDF, 217 KB
english, 2003
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