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Fabrication and characterization of ZnxMg1−xO thin films by dc magnetron sputtering with a composite target of AZO and Mg
Guo-Jia Fang, Dejie Li, Xinzhong ZhaoVolume:
200
Year:
2003
Language:
english
Pages:
8
DOI:
10.1002/pssa.200306676
File:
PDF, 502 KB
english, 2003