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Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
L. Niinistö, M. Nieminen, J. Päiväsaari, J. Niinistö, M. Putkonen, M. NieminenVolume:
201
Year:
2004
Language:
english
Pages:
10
DOI:
10.1002/pssa.200406798
File:
PDF, 114 KB
english, 2004