Optical mapping of aluminum doped p-type SiC wafers

Optical mapping of aluminum doped p-type SiC wafers

P. J. Wellmann, T. Straubinger, U. Künecke, R. Müller, S. A. Sakwe, M. Pons, A. Thuaire, A. Crisci, M. Mermoux, L. Auvray, J. Camassel
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Volume:
202
Year:
2005
Language:
english
Pages:
4
DOI:
10.1002/pssa.200460436
File:
PDF, 152 KB
english, 2005
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