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A novel process for the preparation of thick porous silicon layers with very high porosity
A. Feyh, F. Laermer, S. Kronmüller, W. MokwaVolume:
202
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/pssa.200461195
File:
PDF, 145 KB
english, 2005