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Fabrication of porous membrane filter from p-type silicon
K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. KostiainenVolume:
202
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/pssa.200461203
File:
PDF, 194 KB
english, 2005