Feature Article: Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
L. Niinistö, J. Päiväsaari, J. Niinistö, M. Putkonen, M. NieminenVolume:
201
Year:
2004
Pages:
1
DOI:
10.1002/pssa.200490011
File:
PDF, 180 KB
2004