Effect of annealing atmosphere on oxygen precipitation and...

physica status solidi (a) 2006 Vol. 203; Iss. 10

Effect of annealing atmosphere on oxygen precipitation and formation of denuded zone in Czochralski silicon wafer

Can Cui, Deren Yang, Xiangyang Ma, Ruixin Fan, Duanlin Que
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
203
Year:
2006
Language:
english
Pages:
6
DOI:
10.1002/pssa.200521282
File:
PDF, 282 KB
english, 2006
Conversion to is in progress
Conversion to is failed