In situ etch treatments of silicon carbide epitaxial layer...

physica status solidi (a) 2006 Vol. 203; Iss. 9

In situ etch treatments of silicon carbide epitaxial layer for morphological quality improvement of the surfaces

S. De Angelis, D. Perrone, L. Scaltrito, S. Ferrero, C. F. Pirri, M. Mauceri, S. Leone, G. Pistone, G. Abbondanza, D. Crippa
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Volume:
203
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssa.200566028
File:
PDF, 135 KB
english, 2006
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