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Diamond – Application to piezoelectric bimorph cantilever sensors
V. Mortet, K. Haenen, J. Potmesil, M. Vanecek, M. D'OlieslaegerVolume:
203
Year:
2006
Language:
english
Pages:
6
DOI:
10.1002/pssa.200671109
File:
PDF, 364 KB
english, 2006