N-type doped nano-diamond in a first MEMS application

N-type doped nano-diamond in a first MEMS application

M. Dipalo, J. Kusterer, K. Janischowsky, E. Kohn
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Volume:
203
Year:
2006
Language:
english
Pages:
6
DOI:
10.1002/pssa.200671114
File:
PDF, 679 KB
english, 2006
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