Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process
C. Dumas, J. Grisolia, L. Ressier, A. Arbouet, V. Paillard, G. Ben Assayag, A. Claverie, M. A. F. van den Boogaart, J. BruggerVolume:
204
Year:
2007
Language:
english
Pages:
5
DOI:
10.1002/pssa.200673232
File:
PDF, 204 KB
english, 2007