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Evolution of the microdefect structure in silicon on isothermal annealing as determined by X-ray diffractometry
Ye. M. Kyslovskyy, T. P. Vladimirova, S. I. Olikhovskii, V. B. Molodkin, E. V. Kochelab, R. F. SeredenkoVolume:
204
Year:
2007
Language:
english
Pages:
7
DOI:
10.1002/pssa.200675680
File:
PDF, 504 KB
english, 2007