Defect structure of silicon crystals implanted with H2+...

physica status solidi (a) 2007 Vol. 204; Iss. 8

Defect structure of silicon crystals implanted with H2+ ions

Artem Shalimov, Kirill D. Shcherbachev, Jadwiga Bak-Misiuk, Andrzej Misiuk
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Volume:
204
Year:
2007
Language:
english
Pages:
7
DOI:
10.1002/pssa.200675697
File:
PDF, 517 KB
english, 2007
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