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Synchrotron-radiation computed laminography for high-resolution three-dimensional imaging of flat devices
Lukas Helfen, Anton Myagotin, Alexander Rack, Petra Pernot, Petr Mikulík, Marco Di Michiel, Tilo BaumbachVolume:
204
Year:
2007
Language:
english
Pages:
6
DOI:
10.1002/pssa.200775676
File:
PDF, 292 KB
english, 2007