Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
A. M. Urbanowicz, B. Meshman, D. Schneider, M. R. BaklanovVolume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200777749
File:
PDF, 260 KB
english, 2008