Stress and stress monitoring in SiC–Si heterostructures

physica status solidi (a) 2008 Vol. 205; Iss. 4

Stress and stress monitoring in SiC–Si heterostructures

Jörg Pezoldt, Richard Nader, Florentina Niebelschütz, Volker Cimalla, Thomas Stauden, Charbel Zgheib, Pierre Masri
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Volume:
205
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/pssa.200777785
File:
PDF, 287 KB
english, 2008
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