Monitoring critical dimensions of bidimensional gratings by...

physica status solidi (a) 2008 Vol. 205; Iss. 4

Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry

M. Foldyna, A. De Martino, E. Garcia-Caurel, R. Ossikovski, F. Bertin, J. Hazart, K. Postava, B. Drevillon
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Volume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200777808
File:
PDF, 582 KB
english, 2008
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