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Observation of interfacial electrostatic field-induced changes in the silicon dielectric function using spectroscopic ellipsometry
J. Price, P. S. Lysaght, S. C. Song, A. C. Diebold, Y. Q. An, M. C. DownerVolume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200777836
File:
PDF, 204 KB
english, 2008