[IEEE ESSDERC 2014 - 44th European Solid State Device Research Conference - Venice Lido, Italy (2014.9.22-2014.9.26)] 2014 44th European Solid State Device Research Conference (ESSDERC) - The importance of the spacer region to explain short channels mobility collapse in 28nm Bulk and FDSOI technologies
Monsieur, F., Denis, Y., Rideau, D., Quenette, V., Gouget, G., Tavernier, C., Jaouen, H., Ghibaudo, G., Lacord, J.Year:
2014
Language:
english
DOI:
10.1109/essderc.2014.6948808
File:
PDF, 2.83 MB
english, 2014