Analysis of Si1–xGex:H thin films with graded composition...

physica status solidi (a) 2008 Vol. 205; Iss. 4

Analysis of Si1–xGex:H thin films with graded composition and structure by real time spectroscopic ellipsometry

N. J. Podraza, Jing Li, C. R. Wronski, E. C. Dickey, M. W. Horn, R. W. Collins
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Volume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200777876
File:
PDF, 378 KB
english, 2008
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