![](/img/cover-not-exists.png)
Innovative process flow to achieve carbon nanotube based interconnects
J. C. Coiffic, M. Fayolle, P. Faucherand, M. Levis, H. Le Poche, J. Dijon, S. MaitrejeanVolume:
205
Year:
2008
Language:
english
Pages:
3
DOI:
10.1002/pssa.200778173
File:
PDF, 235 KB
english, 2008