Effect of O2 partial pressure and substrate temperature on...

Effect of O2 partial pressure and substrate temperature on the plasma emission spectra and ZnO growth behavior

M. Liu, C. Y. Ma, Q. Y. Zhang
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Volume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200778316
File:
PDF, 319 KB
english, 2008
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