Comparison of surface layers on copper, titanium and tantalum created by methane plasma-based ion implantation
G. Kraft, S. Flege, K. Baba, R. Hatada, W. EnsingerVolume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200778330
File:
PDF, 674 KB
english, 2008