Production of nitrogen-containing carbon plasma using shunting arc discharge for carbon nitride films preparation
K. Takaki, K. Imanishi, T. Murakami, S. Mukaigawa, T. Fujiwara, Y. Suda, K. YukimuraVolume:
205
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/pssa.200778341
File:
PDF, 526 KB
english, 2008