Selective photochemical etching of GaN films and laser lift-off for microcavity fabrication
E. Trichas, C. Xenogianni, M. Kayambaki, P. Tsotsis, E. Iliopoulos, N. T. Pelekanos, P. G. SavvidisVolume:
205
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssa.200780215
File:
PDF, 284 KB
english, 2008