Synthesis and characterisation of NCD films on 10 × 10 mm2...

physica status solidi (a) 2008 Vol. 205; Iss. 9

Synthesis and characterisation of NCD films on 10 × 10 mm2 and deposition on 2 inch wafer using rotating substrate-holder set-up

S. Saada, J. C. Arnault, L. Rocha, B. Bazin, P. Bergonzo
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Volume:
205
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/pssa.200879732
File:
PDF, 775 KB
english, 2008
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