In-plane gate transistors implanted with different channel...

In-plane gate transistors implanted with different channel geometries by focussed ion beam in positive mode pattern definition technique

Mihai Draghici, Dorina Diaconescu, Alexander Melnikov, Andreas D. Wieck
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Volume:
207
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/pssa.200925087
File:
PDF, 363 KB
english, 2010
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