In-plane gate transistors implanted with different channel geometries by focussed ion beam in positive mode pattern definition technique
Mihai Draghici, Dorina Diaconescu, Alexander Melnikov, Andreas D. WieckVolume:
207
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/pssa.200925087
File:
PDF, 363 KB
english, 2010