High electron mobility achieved in n-channel 4H-SiC MOSFETs...

High electron mobility achieved in n-channel 4H-SiC MOSFETs oxidized in the presence of nitrogen

B. Zippelius, S. Beljakowa, M. Krieger, G. Pensl, S. A. Reshanov, M. Noborio, T. Kimoto, V. V. Afanas'ev
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Volume:
206
Year:
2009
Language:
english
Pages:
11
DOI:
10.1002/pssa.200925089
File:
PDF, 1.70 MB
english, 2009
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