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Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures
T. Hantschel, C. Demeulemeester, P. Eyben, V. Schulz, O. Richard, H. Bender, W. VandervorstVolume:
206
Year:
2009
Language:
english
Pages:
5
DOI:
10.1002/pssa.200982212
File:
PDF, 511 KB
english, 2009