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Planarization of natural single crystal diamond polishing lines by microwave hydrogen plasma
A. Gaisinskaya, R. Edrei, A. Hoffman, Y. FeldheimVolume:
206
Year:
2009
Language:
english
Pages:
7
DOI:
10.1002/pssa.200982213
File:
PDF, 1.17 MB
english, 2009