Hydrogen implantation-induced large area exfoliation in AlN...

Hydrogen implantation-induced large area exfoliation in AlN epitaxial layers

U. Dadwal, R. Scholz, P. Kumar, D. Kanjilal, S. Christiansen, U. Gösele, R. Singh
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Volume:
207
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssa.200982605
File:
PDF, 419 KB
english, 2010
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