Hydrogen implantation-induced large area exfoliation in AlN epitaxial layers
U. Dadwal, R. Scholz, P. Kumar, D. Kanjilal, S. Christiansen, U. Gösele, R. SinghVolume:
207
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssa.200982605
File:
PDF, 419 KB
english, 2010