Effect of ion energy on structural and electrical...

Effect of ion energy on structural and electrical properties of intrinsic microcrystalline silicon layer deposited in a matrix distributed electron cyclotron resonance plasma reactor

Sanjay K. Ram, Laurent Kroely, Pavel Bulkin, Pere Roca i Cabarrocas
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Volume:
207
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssa.200982905
File:
PDF, 483 KB
english, 2010
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