Effect of ion energy on structural and electrical properties of intrinsic microcrystalline silicon layer deposited in a matrix distributed electron cyclotron resonance plasma reactor
Sanjay K. Ram, Laurent Kroely, Pavel Bulkin, Pere Roca i CabarrocasVolume:
207
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssa.200982905
File:
PDF, 483 KB
english, 2010