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[IEEE 2006 Sixth IEEE Conference on Nanotechnology - Cincinnati, OH, USA (17-20 June 2006)] 2006 Sixth IEEE Conference on Nanotechnology - Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching
Gil bum Kang,, Seong-Il Kim,, Young Hwan Kim,, Min Chul Park,, Yong Tae Kim,, Chang Woo Lee,Volume:
2
Year:
2006
Language:
english
DOI:
10.1109/nano.2006.1717174
File:
PDF, 2.64 MB
english, 2006